9

Effect of Different ALD Al2O3 Oxidants on the Surface Passivation of Black Silicon

Year:
2016
Language:
english
File:
PDF, 408 KB
english, 2016
13

Silicon Surface Passivation by Al2O3: Effect of ALD Reactants

Year:
2011
Language:
english
File:
PDF, 1.00 MB
english, 2011